Résumé
ISO/TR 19319:2013 describes: functions and their relevance to lateral resolution: point spread function (PSF), line spread function (LSF), edge spread function (ESF), modulation transfer function (MTF) and contrast transfer function (CTF); experimental methods for the determination of lateral resolution and parameters related to lateral resolution: imaging of a narrow stripe, sharp edge and square-wave gratings; physical factors affecting lateral resolution, analysis area and sample area viewed by the analyser in Auger electron spectroscopy and X-ray photoelectron spectroscopy.
Informations générales
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État actuel: PubliéeDate de publication: 2013-03Stade: Norme internationale publiée [60.60]
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Edition: 2
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Comité technique :ISO/TC 201/SC 2ICS :71.040.40
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Cycle de vie
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Précédemment
AnnuléeISO/TR 19319:2003
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Actuellement