ISO 17973:2024
2024-07
Résumé
This document specifies a method for calibrating the kinetic energy scales of Auger electron spectrometers with an uncertainty of 3 eV, for general analytical use in identifying elements at surfaces. This document also specifies a method for establishing a calibration schedule.
It is applicable to instruments used in either direct or differential mode, where the resolution is less than or equal to 0,5 % and the modulation amplitude for the differential mode, if used, is 2 eV peak-to-peak. It is applicable to those spectrometers equipped with an inert gas ion gun or other method for sample cleaning and with an electron gun capable of operating at 4 keV or higher beam energy.
Informations générales
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État actuel: PubliéeDate de publication: 2024-07Stade: Norme internationale publiée [60.60]
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Edition: 3
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Comité technique :ISO/TC 201/SC 7ICS :71.040.40
- RSS mises à jour
Cycle de vie
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Précédemment
AnnuléeISO 17973:2016
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Actuellement
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