ISO 14644-10:2022
p
ISO 14644-10:2022
76891
недоступно на русском языке

Тезис  Предпросмотр

This document establishes appropriate testing processes to determine the cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). This document is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, worksurfaces, tools, equipment and devices.

NOTE 1    For the purpose of this document, consideration is only given to the chemical characteristics of a particle. The physical properties of the particle are not considered and this document does not cover the interaction between the contamination and the surface.

NOTE 2    This document does not include the contamination generation process or any time-dependent influences (e.g. deposition, sedimentation, ageing) or process-dependent activities such as transportation and handling. Neither does it include guidance on statistical quality-control techniques to ensure compliance.


Общая информация 

  •  :  Published
     : 2022-05
  •  : 2
  •  : ISO/TC 209 Cleanrooms and associated controlled environments
  •  :
    13.040.35 Cleanrooms and associated controlled environments

Приобрести данный стандарт

ru
Формат Язык
std 1 138 PDF + ePub
std 2 138 Бумажный
  • CHF138

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