ISO 13083:2015 describes a method for measuring the spatial (lateral) resolution of scanning capacitance microscopes (SCMs) or scanning spreading resistance microscopes (SSRMs), which are widely used in imaging the distribution of carriers and other electrical properties in semiconductor devices. The method involves the use of a sharp-edged artefact.
Status: PublishedPublication date: 2015-08
Edition: 1Number of pages: 14
Technical Committee: ISO/TC 201/SC 9 Scanning probe microscopy
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