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Standard and/or project under the direct responsibility of ISO/TC 112 Secretariat Stage ICS
Positive-displacement vacuum pumps — Measurement of performance characteristics — Part 1: Measurement of volume rate of flow (pumping speed)
95.99
Positive-displacement vacuum pumps — Measurement of performance characteristics — Part 1: Measurement of volume rate of flow (pumping speed)
95.99
Positive displacement vacuum pumps — Measurement of performance characteristics — Part 2: Measurement of ultimate pressure
95.99
Positive-displacement vacuum pumps — Measurement of performance characteristics — Part 2: Measurement of ultimate pressure
95.99
Vapour vacuum pumps — Measurement of performance characteristics — Part 1: Measurement of volume rate of flow (pumping speed)
95.99
Vapour vacuum pumps — Measurement of performance characteristics — Part 1: Measurement of volume rate of flow (pumping speed)
90.93
Vapour vacuum pumps — Measurement of performance characteristics — Part 2: Measurement of critical backing pressure
95.99
Vapour vacuum pumps — Measurement of performance characteristics — Part 2: Measurement of critical backing pressure
90.93
Vacuum technology — Flange dimensions
95.99
Vacuum technology — Dimensions of non-knife edge flanges
60.60
Vacuum technology — Quick-release couplings — Dimensions — Part 1: Clamped type
95.99
Vacuum technology — Quick release couplings — Dimensions — Part 2: Screwed type
95.99
Vacuum technology — Dimensions of clamped-type quick-release couplings
95.99
Vacuum technology — Dimensions of clamped-type quick-release couplings
60.60
Vacuum technology — Vocabulary — Part 1: General terms
95.99
Vacuum technology — Vocabulary — Part 1: General terms
90.20
Vacuum technology — Vocabulary — Part 2: Vacuum pumps and related terms
95.99
Vacuum technology — Vocabulary — Part 2: Vacuum pumps and related terms
60.60
Vacuum technology — Vocabulary — Part 3: Vacuum gauges
95.99
Vacuum technology — Vocabulary — Part 3: Total and partial pressure vacuum gauges
90.20
Vacuum gauges — Calibration by direct comparison with a reference gauge
90.92
Vacuum gauges — Calibration by direct comparison with a reference gauge
95.99
Vacuum gauges — Calibration by direct comparison with a reference gauge
20.99
Vacuum technology — Bakable flanges — Part 2: Dimensions of knife-edge flanges
95.99
Vacuum technology — Bakable flanges — Dimensions
95.99
Vacuum technology — Bakeable flanges — Dimensions of knife-edge flanges
95.99
Vacuum technology — Dimensions of knife-edge flanges
90.92
Vacuum technology — Dimensions of knife-edge flanges
20.60
Vacuum technology — Graphical symbols
95.99
Vacuum technology — Turbomolecular pumps — Measurement of performance characteristics
95.99
Vacuum technology — Vacuum gauges — Characteristics for a stable ionisation vacuum gauge
60.60
Vacuum technology — Mounting dimensions of pipeline fittings — Part 1: Non knife-edge flange type
95.99
Vacuum technology — Mounting dimensions of pipeline fittings — Part 1: Non knife-edge flange type
60.60
Vacuum technology — Mounting dimensions of pipeline fittings — Part 2: Knife-edge flange type
95.99
Vacuum technology — Mounting dimensions of pipeline fittings — Part 2: Knife-edge flange type
60.60
Vacuum technology — Pipeline fittings — Mounting dimensions
95.99
Vacuum gauges — Definitions and specifications for quadrupole mass spectrometers
90.93
Vacuum technology — Vacuum gauges — Specifications, calibration and measurement uncertainties for Pirani gauges
90.93
Vacuum technology — Vacuum gauges — Specifications, calibration and measurement uncertainties for capacitance diaphragm gauges
90.93
Vacuum technology — Vacuum gauges — Characterization of quadrupole mass spectrometers for partial pressure measurement
90.93
Vacuum technology — Vacuum gauges — Procedures to measure and report outgassing rates
90.93
Vacuum technology — Right-angle valve — Dimensions and interfaces for pneumatic actuator
95.99
Vacuum technology — Right-angle valve — Dimensions and interfaces for pneumatic actuator
60.60
Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 1: General description
95.99
Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 1: General description
60.60
Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 2: Positive displacement vacuum pumps
95.99
Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 2: Positive displacement vacuum pumps
60.60
Vacuum technology — Standard methods for measuring vacuum pump performance — Part 3: Specific parameters for mechanical booster vacuum pumps
90.93
Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 4: Turbomolecular vacuum pumps
90.92
Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 4: Turbomolecular vacuum pumps
20.00
Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 5: Non-evaporable getter (NEG) vacuum pumps
60.60
Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 6: Cryogenic vacuum pumps
60.60
Vacuum technology — Standard methods for measuring vacuum-pump performance — General description
95.99
Vacuum technology — Vacuum gauges — Specifications, calibration and measurement uncertainties for spinning rotor gauges
90.92
Vacuum technology — Vacuum gauges — Specifications, calibration and measurement uncertainties for spinning rotor gauges
40.60
Vacuum technology — Turbomolecular pumps — Measurement of rapid shutdown torque
90.93
Vacuum technology — Vacuum gauges — Evaluation of the uncertainties of results of calibrations by direct comparison with a reference gauge
90.92
Vacuum technology — Vacuum gauges — Evaluation of the uncertainties of results of calibrations by direct comparison with a reference gauge
95.99
Vacuum technology — Vacuum gauges — Evaluation of the uncertainties of results of calibrations by direct comparison with a reference gauge
20.99
Vacuum technology — Vacuum gauges — Specifications for hot cathode ionization gauges
90.93
Vacuum technology — Valves — Leak test
90.93

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