International Standard
ISO 23131:2021
Ellipsometry — Principles
Reference number
ISO 23131:2021
ISO 23131:2021
Edición 1
2021-04
2021-04
© ISO 2024
International Standard
Resumen
This document specifies a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality assurance and material development through accredited test laboratories.
It is applicable to stand-alone measuring systems. The presentation of the uncertainty of results conforms to ISO/IEC Guide 98-3.
Informaciones generales
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Estado: PublicadoFecha de publicación: 2021-04Etapa: Norma Internacional publicada [60.60]
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Edición: 1Número de páginas: 15
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Comité Técnico :ISO/TC 107ICS :17.020
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