International Standard
ISO 23131:2021
Ellipsometry — Principles
Reference number
ISO 23131:2021
Edition 1
2021-04
International Standard
Read sample
ISO 23131:2021
74663
Published (Edition 1, 2021)

ISO 23131:2021

ISO 23131:2021
74663
Language
Format
CHF 96
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Abstract

This document specifies a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality assurance and material development through accredited test laboratories.

It is applicable to stand-alone measuring systems. The presentation of the uncertainty of results conforms to ISO/IEC Guide 98-3.

General information

  •  : Published
     : 2021-04
    : International Standard published [60.60]
  •  : 1
     : 15
  • ISO/TC 107
    17.020 
  • RSS updates

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