Reference number
ISO 18115-3:2022
© ISO 2024
International Standard
ISO 18115-3:2022
Surface chemical analysis — Vocabulary — Part 3: Terms used in optical interface analysis
Edition 1
2022-06
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Published (Edition 1, 2022)

ISO 18115-3:2022

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Abstract

This document defines terms for surface chemical analysis in the area of optical interface analysis including ellipsometry, Raman spectroscopy and nonlinear optical techniques as well as general optical terms.

General information

  • Status
     : Published
    Publication date
     : 2022-06
    Stage
    : International Standard published [60.60]
  • Edition
     : 1
    Number of pages
     : 35
  • Technical Committee :
    ISO/TC 201/SC 1
  • RSS updates

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This standard contributes to the following Sustainable Development Goals

3
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4
Quality Education
7
Affordable and Clean Energy
8
Decent Work and Economic Growth
9
Industry, Innovation and Infrastructure

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