ISO 20341:2003

Published (Edition 1, 2003)

This publication was last reviewed and confirmed in 2019. Therefore this version remains current.

ISO 20341:2003

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Abstract

ISO 20341:2003 specifies procedures for estimating three depth resolution parameters, viz the leading-edge decay length, the trailing-edge decay length and the Gaussian broadening, in SIMS depth profiling using multiple delta-layer reference materials.

It is not applicable to delta-layers where the chemical and physical state of the near-surface region, modified by the incident primary ions, is not in the steady state.

General information

Status
: Published

Publication date
: 2003-07

Stage
: International Standard under systematic review [90.20]
Edition
: 1

Number of pages
: 5
Technical Committee :
ISO/TC 201/SC 6

ICS :
71.040.40
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