Reference number
ISO/TS 22933:2022
© ISO 2024
Technical Specification
ISO/TS 22933:2022
Surface chemical analysis — Secondary ion mass spectrometry — Method for the measurement of mass resolution in SIMS
Edition 1
2022-04
Technical Specification
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Published (Edition 1, 2022)

ISO/TS 22933:2022

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Format
CHF 96
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Abstract

This document specifies a method for measuring the mass resolution in SIMS, and how to compare the mass resolution between different instruments (e.g. TOF-SIMS, Magnetic SIMS, Quadrupole SIMS, Fourier Transform SIMS, etc.) by considering the peak shapes.

General information

  • Status
     : Published
    Publication date
     : 2022-04
    Stage
    : International Standard published [60.60]
  • Edition
     : 1
    Number of pages
     : 15
  • Technical Committee :
    ISO/TC 201/SC 6
    ICS :
    71.040.40 
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9
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