Reference number
ISO 21360-4:2018
International Standard
ISO 21360-4:2018
Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 4: Turbomolecular vacuum pumps
Edition 1
2018-07
Preview
ISO 21360-4:2018
69441
No disponible en español
Publicado (Edición 1, 2018)
Esta publicación se revisó y confirmó por última vez en 2024. Por lo tanto, esta versión es la actual.

ISO 21360-4:2018

ISO 21360-4:2018
69441
Idioma
Formato
CHF 63
Convertir Franco suizo (CHF) a tu moneda

Resumen

This document, in conjunction with ISO 21360-1, specifies methods for the measurement of performance characteristics of turbomolecular vacuum pumps. It is applicable to all sizes and all types of turbomolecular vacuum pumps, including those

— with mechanical or magnetic bearings;

— with or without an additional drag stage(s) or other pumping stages on the shaft;

— with one or more inlet ports.

Since turbomolecular vacuum pumps are backed by primary pumps, their performance cannot be completely defined by the volume flow rate curve. Also, the driving device and the backing pressure of the turbomolecular vacuum pump is important to the performance.

The following completes the performance characteristics:

— information about throughputs and backing pressure of the turbomolecular vacuum pump;

— the compression ratio curve (compression ratio vs backing pressure of turbomolecular vacuum pump).

Informaciones generales

  •  : Publicado
     : 2018-07
    : Norma Internacional para revisar [90.92]
  •  : 1
     : 10
  • ISO/TC 112
    23.160 
  • RSS actualizaciones

Ciclo de vida

¿Tiene alguna duda?

Consulte nuestras Ayuda y asistencia