ISO 13084:2018

Published (Edition 2, 2018)

This publication was last reviewed and confirmed in 2024. Therefore this version remains current.

ISO 13084:2018

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Abstract

This document specifies a method to optimize the mass calibration accuracy in time-of-flight secondary ion mass spectrometry (SIMS) instruments used for general analytical purposes. It is only applicable to time-of-flight instruments but is not restricted to any particular instrument design. Guidance is provided for some of the instrumental parameters that can be optimized using this procedure and the types of generic peaks suitable to calibrate the mass scale for optimum mass accuracy.

General information

Status
: Published

Publication date
: 2018-11

Stage
: International Standard to be revised [90.92]
Edition
: 2

Number of pages
: 15
Technical Committee :
ISO/TC 201/SC 6

ICS :
71.040.40
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