Abstract
This International Standard specifies the guidelines of the method and procedure for determining the effect of temperature on atomic force microscope (AFM) nano-scale dimension measurements. The effect of temperature can be evaluated by continuously measuring the changes of the X- and Y- pitches and height of a two-dimensional (2D) calibration grating in an environmental temperature controllable AFM. If necessary, this method and procedure can be used to evaluate the effect of temperature on dimension measurement of other scanning probe microscopes(SPMs).
General information
-
Status: Under developmentStage: CD consultation initiated [30.20]
-
Edition: 1
-
Technical Committee :ISO/TC 201/SC 9
- RSS updates
Life cycle
Got a question?
Check out our FAQs
Customer care
+41 22 749 08 88
Opening hours:
Monday to Friday - 09:00-12:00, 14:00-17:00 (UTC+1)