Abstract
PreviewISO/TR 19319:2013 describes: functions and their relevance to lateral resolution: point spread function (PSF), line spread function (LSF), edge spread function (ESF), modulation transfer function (MTF) and contrast transfer function (CTF); experimental methods for the determination of lateral resolution and parameters related to lateral resolution: imaging of a narrow stripe, sharp edge and square-wave gratings; physical factors affecting lateral resolution, analysis area and sample area viewed by the analyser in Auger electron spectroscopy and X-ray photoelectron spectroscopy.
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Status: PublishedPublication date: 2013-03
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Edition: 2Number of pages: 116
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- ICS :
- 71.040.40 Chemical analysis
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Format | Language | |
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std 1 208 | PDF + ePub | |
std 2 208 | Paper |
- CHF208
Life cycle
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Previously
WithdrawnISO/TR 19319:2003
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