International Standard
ISO 18118:2024
Surface chemical analysis — Auger electron spectroscopy and X-ray photoelectron spectroscopy — Guide to the use of experimentally determined relative sensitivity factors for the quantitative analysis of homogeneous materials
Reference number
ISO 18118:2024
Edition 3
2024-02
© ISO 2024
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Published (Edition 3, 2024)

ISO 18118:2024

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CHF 129
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Abstract

This document gives guidance on the measurement and use of experimentally-determined relative sensitivity factors for the quantitative analysis of homogeneous materials by Auger electron spectroscopy and X-ray photoelectron spectroscopy. The methods described only apply to polycrystalline and amorphous materials, as effects inherent to single-crystal samples are not addressed.

General information

  • Status
     : Published
    Publication date
     : 2024-02
    Stage
    : International Standard published [60.60]
  • Edition
     : 3
    Number of pages
     : 22
  • Technical Committee :
    ISO/TC 201/SC 7
    ICS :
    71.040.40 
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This standard contributes to the following Sustainable Development Goal

9
Industry, Innovation and Infrastructure

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